Foundations of Mems 2Nd Edition Chang Liu Solutions Manual Full Chapter PDF
Foundations of Mems 2Nd Edition Chang Liu Solutions Manual Full Chapter PDF
Instructor Manual
Foundations of MEMS
Chang Liu
Northwestern University
Chapter 7
1
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Problems
Problem 1: Review
Prove that the unit of piezoelectric coefficient is C/N from the governing equation of the inverse effect of
piezoelectricity.
Answer:
The unit of d is
[ s] 1
[d ] = =
[E] V / m
Multiply the numerator and the denominator with the unit of charge, C
[s] 1 Cm
[d ] = = =
[ E ] V / m CV
The product of C and V gives energy, which is equivalent to Newton multipled by distance, meter,
[s] 1 Cm Cm C
[d ] = = = = =
[ E ] V / m CV Nm N
Problem 2: Design
Solution:
For pure torque, the force generated by the piezoelectric actuator should be parallel to the substrate
surfaces to cause the substrate to rotate. For a beam structure, there are two methods to achieve this, as
shown in picture below.
(a) The piezoelectric layer is sandwiched between two top electrodes and a common bottom electrode.
By applying opposite potentials to the two top electrodes with respect to the common bottom electrode,
opposite strains are generated around the two long edges of the beam due to opposite directions of electric
fields. The combination of the opposite deformation (expand and shrink) can cause the beam to rotate.
(b) Similar to method (a), rearranging the top electrodes, opposite strains can be generated at two short
edges of the beam due to opposite directions of electric fields. The combination of the opposite
deformation (expand and shrink) can cause the beam to rotate.
2
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F
piezoelectric layer top electrode
F
bottom electrode
substrate
(a)
substrate
F
(b)
Problem 3: Design
A piezoelectric force sensor has the following configuration. If a force is applied in the direction shown,
what will be the expression of the output voltage?
Solution:
(a)
Assuming the uniform stress in the cantilever, the stress along axis 1 is
F
T1 =
A
where T1 is the stress generated by force F, and A the cross section area of the cantilever.
3
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written permission should be obtained from the publisher prior to any prohibited reproduction, storage in a retrieval system, or
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D1 d F
V = E1L p = L p = 11
ε εA
(b)
Assuming the uniform stress in the cantilever, the stress along axis 3 is
F
T3 =
A
where T3 is the stress generated by force F, and A the cross section area of the cantilever.
D3 d F
V = E3 L p = L p = 33
ε εA
Problem 4: Design
Solution:
For piezoelectric actuators without external mechanical stress, the strain is induced by actuation voltage
V. According to Equation 6, the electrical strains
4
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written permission should be obtained from the publisher prior to any prohibited reproduction, storage in a retrieval system, or
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s1 d11 d 21 d31
s d
2 12 d 22 d 32
E1
s3 d13 d 23 d 33
= E2 ,
s4 d14 d 24 d 34 E
s5 d15 d 25 d35 3
6 16
s d d 26 d 36
d 31V
s1 = d 31 E3 = .
tp
where tp, te, Ap, Ae, Ep, Ee, Ip, Ie are the thicknesses, cross section areas, Young’s moduli, and moments of
the piezoelectric (p) and elastic (e) layers.
The vertical displacement at the end of the cantilever is, according to Equation 9:
V
L2 d 31 (t p + t e ) Ae Ee A p E p
tp
δ ( L) ≈ .
4( Ae Ee + A p E p )( E p I p + E e I e ) + (t e + t p ) 2 Ae Ee A p E p
Problem 5: Design
Solution:
The output force is linearly related to the cantilever displacement. From problem 4, the displacement at
the end of the cantilever is
V
L2 d 31 (t p + t e ) Ae Ee A p E p
tp
δL ≈
4( Ae Ee + A p E p )( E p I p + Ee I e ) + (t e + t p ) 2 Ae Ee A p E p
where V, L are the applied voltage and the length of cantilever, and tp, te, Ap, Ae, Ep, Ee, Ip, Ie are the
thicknesses, cross section areas, Young’s moduli, and moments of the piezoelectric (p) and elastic (e)
layers.
5
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Since the thickness of the piezoelectric layer can be continuously changed within the range of 5% to
100% of the thickness of the elastic layer, assume
t p = xt e , where 0.05 ≤ x ≤ 1 . The cross section areas and moments are
w p t e3
A p = w p t p = xw p t e , I p = x3 ,
12
we t e3
Ae = we t e , I e = ,
12
and
Ae Ee A p E p = xwe t e Ee w p t e E p = xt e2 we w p Ee E p .
V
L2 d 31
tp
( )
t e + t p Ae Ee A p E p
δL ( x) ≈
4( Ae Ee + A p E p )( E p I p + Ee I e ) + (t e + t p ) 2 Ae Ee A p E p
V
L2 d 31 t e (1 + x) xt e2 we w p Ee E p
xt e
=
E p x 3 w p t e3 Ee we t e3
4( we t e Ee + xw p t e E p )( + ) + (1 + x)t e2 xt e2 t p we w p Ee E p
12 12
L2 d 31V (1 + x) we w p Ee E p
=
E p x3w p Ee we
4t e2 ( we Ee + xw p E p )( + ) + (1 + x)t e2 xwe w p Ee E p
12 12
δ L is a function of x, the ratio of the thicknesses of the two layers, and can be evaluated once the other
parameters are known.
Problem 6: Design
Solution:
For piezoelectric actuators without external mechanical stress, the strain is induced by actuation voltage
V. According to Equation 6, the electrical strains
s1 d11 d 21 d31
s d
2 12 d 22 d 32
E1
s3 d13 d 23 d 33
= E2 ,
s d d d
4
14 24 34
E
s5
d15 d 25 d35 3
s6 d16 d 26 d 36
6
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d 31V
s1 = d 31 E3 = .
tp
From Equation 8, the radius of curvature (r) of bended piezoelectric patch is:
1 2 s1 (t p + t e )( A p E p Ae Ee )
=
r 4( E p I p + Ee I e )( A p E p + Ae Ee ) + ( A p E p Ae E e )(t p + t e ) 2
2d 31 E3 (t p + t e )( A p E p Ae Ee )
=
4( E p I p + Ee I e )( A p E p + Ae Ee ) + ( A p E p Ae Ee )(t p + t e ) 2
V
2d 31 (t p + t e )( A p E p Ae Ee )
tp
=
4( E p I p + Ee I e )( A p E p + Ae Ee ) + ( A p E p Ae Ee )(t p + t e ) 2
where tp, te, Ap, Ae, Ep, Ee, Ip, Ie are the thicknesses, cross section areas, Young’s moduli, and moments of
the piezoelectric (p) and elastic (e) layers.
The vertical displacement at the end of the piezoelectric patch is, according to Equation 9:
2 V
l p d 31 (t p + t e ) Ae Ee A p E p
tp
δ (l p ) ≈ .
4( Ae Ee + A p E p )( E p I p + Ee I e ) + (t e + t p ) 2 Ae Ee A p E p
The rest of the cantilever does not curve and remains straight. The vertical displacement at the end of the
cantilever is
[
δ ( L) = δ (l p ) + ( L − l p ) sin φ(l p ) . ]
Problem 7: Analysis
Solution:
From Equation 9,
x 2 d 31 E3 (t p + t e ) Ae Ee A p E p
δ ( x) = r − r cos(φ) ≈
4( Ae Ee + A p E p )( E p I p + Ee I e ) + (t e + t p ) 2 Ae Ee A p E p
where tp, te, Ap, Ae, Ep, Ee, Ip, Ie are the thicknesses, cross section areas, Young’s moduli, and moments of
the piezoelectric (p) and elastic (e) layers, and E3 the electric field in piezoelectric layer. Assuming same
width w for the piezoelectric and the elastic layers,
7
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wt 3p
A p = wt p , I p = ,
12
wt e3
Ae = wt e , I e = ,
12
and
Ae Ee A p E p = wt e Ee wt p E p = w 2 t e t p Ee E p .
x 2 d 31 E3 (t p + t e ) Ae Ee A p E p
δ ( x) ≈
4( Ae Ee + A p E p )( E p I p + Ee I e ) + (t e + t p ) 2 Ae Ee A p E p
x 2 d 31 E3 (t p + t e ) w 2t e t p Ee E p
=
E p wt 3p Ee wt 3e
4( wt e Ee + wt p E p )( + ) + (t e + t p ) 2 w 2 t e t p Ee E p
12 12
x 2 d 31 E3 (t p + t e )t e t p Ee E p
=
1
(t e Ee + t p E p )( E p t 3p + Ee t e3 ) + (t e + t p ) 2 t e t p Ee E p
3
Problem 10: Review
Solution:
(a)
When the proof mass is bent down, the stress is compressive (-) around the proof mass and tensile (+)
around the outer frame.
D3 = d 31T1 ,
D3 d 31T1
E3 = = ,
ε ε
d 31t p
V = E3 t p = T1 .
ε
Since the voltage generated at the top electrodes are of same signs with the stresses, the voltage is positive
(+) at the outer ring, and (-) at the inner ring.
8
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transmission in any form or by any means, electronic, mechanical, photocopying, recording, or likewise. For information
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(a)
When the proof mass is bent up, the stress is tensile (+) around the proof mass and compressive (-) around
the outer frame.
Again, since the voltage generated at the top electrodes are of same signs with the stresses, the voltage is
negative (-) at the outer ring, and positive (+) at the inner ring.
For a circular plate with a radius of a and a thickness of t, the deformation profile and stress (radial) under
a distributed pressure p is easy to solve. The maximum displacement is
pa 4
wmax =
64 D
where
Et 3
D=
12(1 −ν 2 )
where D is called the flexural rigidity and ν is the Poisson’s ratio. The distribution of radial stress is
12 M r z 12 z p 2
σr = 3
= 3 [a (1 + ν ) − r 2 (3 + ν )]
t t 16
where z is the distance to the center (neutral) plane of the membrane.
Problem 13: Fabrication
Hint:
There is little change compared to the case discussed in the text. In reality, the process is simplified.
Problem 15: Design
Solution:
9
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written permission should be obtained from the publisher prior to any prohibited reproduction, storage in a retrieval system, or
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0 0 0 0 < 1 0
d =0 0 0 < 1 0 0 pC / N
20 2 − 30 0 0 0
The coefficients associated with shear loading are generally very small (being zero or less than 1 pC/N).
This device will not be sensitive to shear loading.
Review literature for methods that can be used to pattern and etch PVDF films.
10
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The Important Parts of a Canoe, Giving Names for the Information of the
Novice
Points to be Considered
Paddles
The best material for paddles is good selected spruce, and while
this material is not so heavy nor will stand hard knocks so well as
maple or birch, its lightness makes it the choice of many paddlers.
For rough work the maple paddle may be chosen, and while heavier
than spruce, it possesses greater elasticity, and this spring offsets to
a great extent the larger weight of material. Cedar, ash, and pine
make excellent paddles, and the Indians often fashion them from
these woods.
In selecting a single-blade paddle, it is well to remember that the
length will depend on the paddler’s height, for it is self-evident that a
tall man will require a longer paddle than a short person can
conveniently swing. Hence the usual rule is to pick out a paddle as
long as the paddler is tall, and is a sensible one to follow, although
there are exceptions. Personal preferences differ, and, also, a longer
paddle will be required when paddling from seats than when a
kneeling position is adopted. For general use, the stern paddle of
5¹⁄₂-ft. length will be long enough, while the bow paddle of 5 ft. will
probably suit the average man. Ladies, boys, and girls will need
shorter lengths.
The shape of the paddle blades varies somewhat, and while some
prefer a broad blade and others a narrow one, it is well to pick out
one of medium size. Large blades are tiresome for long trips, while
the narrow blade balances best in the hand, but affords less
resistance in the water. When picking out a spruce paddle, see that
there is plenty of wood at the juncture of the blade and shaft, for it is
at this point most paddles break. Spruce being a comparatively soft
wood, it will fur badly, and the blades should be fitted with copper
tips to prevent splitting. Maple paddles do not need this protection,
but most builders err in making them too thick and heavy. Pick out
the lightest and thinnest maple paddle that can be found, one that is
fashioned of straight-grained wood, and test it for elasticity before
making the purchase. A couple of coats of spar varnish will keep the
paddles in good shape, but as a varnished surface is hard on the
hands, most veteran canoeists varnish the blades and finish the
shafts with oil. An extra paddle will, of course, be carried on all long
trips.
Canoe Yoke Equipped with Adjustable Shoulder Pads, and the Pneumatic
Carrier That Serves Two Purposes
When the weight of the canoe does not exceed 65 lb., it is easily
carried by placing the paddle blades over the center thwart, the ends
under the next after thwart and lashing them securely in place; then
placing a sweater or coat over the shoulder to form a pad on which
to rest the paddles to carry the canoe in an inverted position.
However, when long portages must be undertaken the “neck yoke,”
or the pneumatic canoe yoke, may be used. The neck yoke is
fashioned from a block of pine, or other soft wood, to fit the curve of
the shoulders, and the ends fit in the grooves made in the gunwales;
or small pieces of wood may be screwed to the under side of the
gunwale to serve the same purpose. The pneumatic cushion, which
fits around the neck and is provided with straps to secure the
paddles in position, is well-liked by some canoeists, but the wood
neck yoke fits so well that it is hard to find a good substitute. A large
and heavy craft can be easily carried by two men by turning the craft
bottom side up and resting the weight on the back and shoulders. If
the man at the stern lets the gunwale rest on his shoulders and his
companion lower the front thwart to rest against his neck and
shoulders, both may carry a light pack of duffle and will have a clear
view of the trail ahead.
To Practice Batting for Baseball Playing
The material for the heads and the blades was glued up and
finished to the sizes given at A and B. The material was cut to gauge
lines on the band saw, the blades being a scant ¹⁄₈ in. in thickness,
and the stocks, ³⁄₈ in. Two of each were cut from each prepared
piece, first from one side and then from the other. They were then
faced off on both sides, and two more pieces cut. With careful
cutting, six blades and six stocks were made from each piece. This
left one side of each piece to be planed after sawing. The holes for
the screws were drilled with a small hand drill.
Stock and Blade Material for Making the Parts, and the Jig for Assembling
For assembling, a jig was made by nailing a piece of stock, ³⁄₈ in.
thick, to a straight drawing board. One end of the piece was planed
straight and true before it was fastened in place. Stops were
provided to locate the stock and hold the blade square with it.
Wedges were used to keep both stock and blade against the stops
while the screws were inserted. The wedges were not driven with a
hammer, but pushed in firmly with the fingers.
¶Insert a scratch awl in common hard soap for hardening, and it will
need no drawing after the plunge.
Paddling Your Own Canoe
by
Stillman Taylor
PART II—The Knack of
Handling the Paddle
The Stroke of the Paddle is Made with the Body Motionless, One Hand
Grasping the Shaft of the Paddle and the Other Holding It a Short Distance
above the Blade