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FM-DS-07-108 (Silane)
FM-DS-07-108 (Silane)
SILANE
Table of Contents
Page
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7-108 Silane
Page 2 FM Global Property Loss Prevention Data Sheets
List of Figures
Fig. 1. Silane cylinder storage and dispensing locations .............................................................................. 4
Fig. 2. Bulk silane storage facility .................................................................................................................. 5
Fig. 3. Separation of exposures during site selection ................................................................................. 15
Fig. 4. Site layout for example A, proposed silane tube trailer ................................................................... 17
Fig. 5a. Silane flow rate through cylinder RFOs (L/min) ............................................................................ 19
Fig. 5b. Silane flow rate through cylinder RFOs (scfm) ............................................................................. 19
List of Tables
Table 1. Hazardous Electrical Areas for Silane Installations ........................................................................ 14
Table 2. Values of n ...................................................................................................................................... 16
Table 3. Values of A (for D in Meters if d is specified in mm) ...................................................................... 16
Table 4. Values of A (for D in Feet if d is specified in inches) ..................................................................... 16
1.0 SCOPE
This data sheet applies to hazards associated with silane gas storage and dispensing to process equipment
at end-user facilities, such as manufacturing of semiconductors, photovoltaic cells, flat panel displays, other
specialty glass and fibers, and experimental installations in laboratories. Recommendations are provided
to help prevent the accidental release of silane, and to mitigate property damage if a release does occur and
results in a fire or explosion.
Also consult local code requirements and industry standards for silane installations. Code compliance is
outside the scope of this data sheet.
1.1 Changes
April 2014. Silane hazards and safeguards were previously addressed in DS 7-7, Semiconductor Fabrication
Facilities. Data Sheet 7-108 has been created because silane usage has expanded in recent years to
industries beyond semiconductor manufacturing. Many recommendations pertaining to silane have been
transferred from DS 7-7 to this data sheet. Key changes to the recommendations previously published in DS
7-7 include the following:
1.1.1 Added new recommendations for a more comprehensive approach to the prevention of accidental silane
releases.
1.1.2 Revised separation distances between outdoor silane containers and main buildings based on studies
and silane explosion modeling performed by FM Global.
1.1.3 Deleted former Recommendation 2.2.11.1.7(f) for installation of pressure relief devices on silane tubes
(to reflect current industry and code trends).
2.1 Introduction
Accidental releases of silane from storage containers, dispensing systems, and end-use equipment have
resulted in severe explosion and fire damage to exposed buildings and their contents. The majority of property
loss can be prevented by following these basic safeguards:
• Implement robust containment design.
• Provide effective personnel training.
• Strictly adhere to safe operating and maintenance procedures.
2.2.1 Cylinders
The term “cylinder” refers to individual containers of up to 13 gal (50 L) water capacity. Larger capacity
containers or groups of interconnected (manifolded) cylinders, also called “cylinder packs,” are addressed
as “bulk containers” (see Section 2.2.2).
2.2.1.1 Strictly limit the number of silane cylinders on site and keep them in designated areas that provide
ready access for emergency responders.
2.2.1.2 Locate silane cylinders outdoors and at least 50 ft (15 m) away from main buildings, outdoor
equipment, and important utilities (see Figure 1, location I).
Note: An explosion hazard is present when silane is stored or dispensed outdoors. Space separation of 50
ft (15 m) is expected to help mitigate property loss in the event of relatively small releases of silane, assuming
the cylinders are fitted with restrictive flow orifices (RFOs) per Section 2.5.3. Severe local blast damage may
occur in the dispensing or storage area under some release conditions, even if RFOs are present.
2.2.1.3 Where an indoor location is unavoidable, use small, detached buildings of damage-limiting wall and
roof construction per DS 1-44, Damage-Limiting Construction, (locations I and II in Figure 1).
2.2.1.4 Where it is not possible to locate cylinders outdoors or in a detached building, provide a cut-off room
at grade level along an outside wall with direct access from outside the main building (location III or IV in
Figure 1). Determine the design strength of pressure-resistant and relieving walls using DS 1-44, based on
the hydrogen criteria.
III
Exposed
Main Building
II
I
D>50 ft (15 m)
I
Note: An explosion hazard is present when silane is stored or dispensed indoors. Damage-limiting
construction (DLC) may help mitigate property loss in the event of explosion following relatively small releases
of silane, assuming the cylinder is fitted with an RFO. Severe local blast damage may occur under some
release conditions, even if an RFO and DLC are provided as recommended.
2.2.1.5 Isolate outdoor cylinder pads and detached buildings from potential external fire exposures, including
vegetation, combustible construction, outdoor transformers, ignitable liquid storage, ignitable liquid processes,
oxidizers and other hazardous materials, idle pallets, and bulk combustible yard storage.
2.2.1.6 Install indoor dispensing cylinders inside ventilated gas cabinets arranged in accordance with this
data sheet (Section 2.5.4).
2.2.1.7 Provide controls to prevent authorized acess to cylinder storage and dispensing installations.
Note: The recommended 50 ft (15 m) separation distance assumes an explosion following an unconfined
outdoor release that is limited by a 1/8 in. (3.2 mm) diameter or smaller RFO (or equivalent flow restriction)
located upstream of the release point. For larger diameters, or for releases into enclosed or partially enclosed
spaces, such as multisided weather enclosures, greater distances may be needed as outlined in Sections
3.2.1.3 and 3.2.1.4.
2.2.2.2 Isolate bulk containers from potential external fire exposures such as combustible construction,
outdoor transformers, cooling towers, ignitable liquid storage and processes, oxidizers and other hazardous
materials, idle pallets, and other bulk combustible storage.
2.2.2.2.1 Ensure that any exposing ignitable liquid storage and process areas are provided with spill
containment and emergency drainage to a safe location.
2.2.2.3 Separate bulk containers from each other and from the regulator station by 2-hour fire-rated walls
extending at least 3 ft (1 m) above the containers (see Figure 2).
2.2.2.4 Provide open chain link fencing to help restrict unauthorized access to bulk installations.
2.3 Occupancy
2.3.3.2 Design air intakes and exhaust outlets to ensure proper circulation and eliminate stagnant zones
within the room.
2.3.3.3 Monitor and alarm the ventilation system at a control room or other constantly attended location.
2.3.3.4 Use noncombustible exhaust ductwork.
2.3.3.5 Provide an emergency power supply in accordance with Data Sheet 5-23.
2.4 Protection
2.5.1.3 If aluminum cylinders are used, limit them to 6061 alloy individual cylinders (not cylinder packs).
2.5.1.4 Provide a 0.25 in. (7 mm) thick steel partition between aluminum cylinders located in a common gas
cabinet.
2.5.1.5 In open manifold racks, provide a steel partition between the silane cylinders as follows:
A. Use a 0.25 in. (7 mm) thick steel plate partition extending 3 in. (76 mm) beyond the footprint of the
cylinder.
B. Extend the plate from the top of the purge panel to 12 in. (305 mm) below the cylinder valve.
2.5.1.6 Construct ventilation ducts of noncombustible materials.
F. Provide device redundancy with a voting protocol, where appropriate, to minimize unnecessary or
nuisance trips.
2.5.5.4 For each end-use process, provide a manual emergency shutdown system that meets the following
criteria:
A. Capable of isolating the silane supply and initiating a controlled process shutdown in the event of alarms
or other conditions indicating imminent critical upsets as identified in the process hazards analysis.
B. Capable of activation at remote locations that will be accessible to operators and emergency responders
during a fire or other emergency in the process area.
C. Functionally independent to ensure operators can achieve a controlled shutdown in the event of
software or hardware malfunctions in the basic process control system (PLC or DCS).
2.5.5.5 Document the emergency isolation system by means of schematics and narrative for use in training,
emergency drills, loss prevention audits, and management of changes.
2.5.9.1 Provide continuous mechanical exhaust ventilation systems for gas cabinets and enclosures. Size
these systems to limit the average concentration to 0.4% by volume, based on a continuous release of silane
at a standard volumetric flow rate as determined by the size of the RFO in the discharge line and the
maximum cylinder pressure.
Further guidance and example safety ventilation calculations are provided in Section 3.3.1.
2.5.9.2 Monitor the exhaust ventilation and interlock it with the emergency shutdown system in accordance
with Section 2.5.5.2.
2.5.9.3 Provide emergency backup power for the cabinet ventilation system.
2.6.1 General
2.6.1.1 Establish administrative controls and designate responsible personnel to ensure employees and
contractors adhere to established operating and maintenance procedures.
2.6.1.2 Use qualified employees and/or contractors to supervise and perform all operation and maintenance
duties for silane storage and dispensing.
2.6.1.3 Maintain documented operating procedures, including the following:
A. Normal startup and shutdown
B. Container change-out
C. Supervision during normal operation
D. Emergency isolation system
2.6.1.4 Establish documented preventive maintenance procedures in accordance with facility experience
and equipment manufacturers’ guidelines.
2.6.1.5 Conduct regular recorded maintenance and inspection of silane installations according to industry
guidelines, manufacturers’ directions, and facility experience. Conduct visual monthly recorded inspections
of housekeeping and other general conditions in silane storage, delivery, and end-use areas.
2.6.1.6 Establish procedures to report and take prompt corrective action to address equipment failures,
leakage, corrosion, operator error, near-misses, and other deviations from normal conditions.
2.6.2.2 Test excess-flow valves and switches for closing action as recommended by the equipment
manufacturer.
2.6.2.3 Replace or recondition all safety devices based on manufacturers’ recommendations, or when
necessary due to damage or other poor condition.
2.7 Training
2.8.2.3 Conduct annual emergency response drills to reinforce the employee and contractor training program
and to familiarize the fire service with the site layout.
2.10.1.4 Physically manage the authorized work in the silane area using a documented hot work permit
system that specifically evaluates the fire hazards involved.
Exposed
utility
B
Exposed
Bulk A Main Building
silane
C
Exposed or
exposing
yard storage
The prescriptive separation distances recommended in Section 2.2 are suitable for protection against
expected explosion overpressure following an unconfined outdoor release with flow rate limited by a 1/8 in.
(3.2 mm) diameter RFO or equivalent. Where larger diameter release sources are present, the following
methodology can help determine separation distances and evaluate alternative locations:
A. Recognize that any silane storage installation or dispensing system can experience an accidental
release followed by fire and/or explosion.
B. Conduct a process hazard analysis (PHA) to identify and quantify potential credible release sources.
C. For each release source, estimate the flow rate and flammable mass in the silane gas jet or cloud.
D. Use fire and blast models to predict damage effects as a function of distance from the source.
E. Estimate the severity of consequences for each release scenario.
F. Determine tolerable levels of property damage and production outage.
G. Select an acceptable separation distance.
free-jet release (i.e., with discharge into an unconfined and unobstructed outdoor area). If obstacles are
present in the direct path of the jet, flammable mass will increase substantially compared to an unobstructed
jet. A scientific basis for modeling the flammable mass of unobstructed and obstructed free-jet releases can
be found in Estimating Blast Effects from an Accidental Release of High-Pressure Silane by J. Chao, et.
al.
Table 2. Values of n
Criterion Description Example n
Weak building Steel frames, siding, and Central utility or industrial 1.6
roof deck manufacturing building
Strong building Reinforced concrete floors, Semiconductor fabrication 1.9
roof, and walls building
Main Building
A. Process hazards analysis indicates the largest credible release is from a separated connection, with
flow potentially obstructed and limited by a 1/8 in. diameter(3.2 mm) upstream RFO.
B. The tube trailer fill density is 320 g/L, which corresponds to a maximum pressure of 1500 psig at 70°F
(103 barg at 21°C).
C. The silane tube trailer is protected by automatic water spray.
D. Main Building is of steel frame and insulated metal panel (weak) construction.
Metric Units:
Use Tables 2 and 3 to determine the coefficients for weak construction.
Because the discharge is obstructed, use formula (2):
D (in meters) = 2Adn = 2 x (0.46) (3.21.6) = 6 m.
Therefore, use the minimum separation distance of 15 m.
Non-Metric Units:
Use Tables 2 and 4 to determine the coefficients for weak construction.
D (in feet) = 2Adn = 2 x (285) (0.1251.6) = 20 ft.
Therefore, use the minimum separation distance of 50 ft.
3.3 Ventilation
The ventilation recommended in this data sheet performs three different functions:
A. Mechanical exhaust ventilation for gas cabinets and equipment enclosures
B. Forced ventilation over potential silane release points
C. Room exhaust ventilation
350
300
Silane flow rate L/min
250
RFO diameter
200 0.5 mm
0.35 mm
150 0.25 mm
100
50
0
0 20 40 60 80 100 120 140 160
Source pressure, barg
o
* Temperature: 25 C; downstream pressure: 0 barg; discharge coefficient: 0.8
12
10
Silane flow rate scfm
8 RFO diameter
0.020 in.
6 0.014 in.
0.01 in.
0
0 500 1000 1500 2000 2500
Source pressure, psig
o
* Temperature: 77 F; downstream pressure: 0 psig; discharge coefficient: 0.8
4.0 REFERENCES
4.1 FM Global
Data Sheet 1-2, Earthquakes
Data Sheet 1-11, Fire Following Earthquake
Data Sheet 1-40, Flood
Data Sheet 1-44, Damage-Limiting Construction
Data Sheet 2-8, Earthquake Protection for Water-Based Fire Protection Systems
Data Sheet 5-1, Electrical Equipment in Hazardous Locations
Data Sheet 5-23, Emergency and Standby Power Systems
Data Sheet 7-7, Semiconductor Fabrication Facilities
Data Sheet 7-43, Process Safety
Data Sheet 7-45, Instrumentation and Control in Safety Applications
Data Sheet 7-50, Compressed Gases in Cylinders
Data Sheet 9-7, Property Conservation
Data Sheet 10-1, Pre-Incident Planning
Data Sheet 10-2, Emergency Response
Data Sheet 10-3, Hot Work Management
Data Sheet 10-4, Contractor Management
Chao, J., et. al. Estimating Blast Effects from an Accidental Release of High-Pressure Silane. 23rd ICDERS,
Irvine CA, USA. July 24-29, 2011.
4.2 Others
Asia Industrial Gases Association (AIGA). Storage and Handling of Silane and Silane Mixtures. AIGA 052/08.
Chang, Y. Y., et. al. “Revisiting a Silane Explosion in a Photovoltaic Fabrication Plant.” Process Safety
Progress (2007): 155-158.
Chen, J. R., et. al. “Analysis of a Silane Explosion in a Photovoltaic Fabrication Plant.” Process Safety
Progress (September 2006): 237-244.
Compressed Gas Association (CGA). Silane. G132006.
European Industrial gases Association (EIGA). Code of Practice: Silane. IGC Doc 160/10/E.
Nakao, Masayuki. “Silane Gas Explosion at Osaka University.” Failure Knowledge Database. Hatamura
Institute for the Advancement of Technology. http://www.sozogaku.com/fkd/en/cfen/CA1000614.html
(accessed December 5, 2013).
Peng, D. J., et. al., “Failure analysis of a silane gas cylinder valve: A case study”, Engineering Failure Analysis,
15 (2008) 275-280.